Looks ok. The activation is what can be expected.
The immobilization of the ligand looks a little strange. The jump at the beginning is unexpected. I wonder how concentrated is the stock solution of the ligand and what is the buffer composition?
The amount of bound ligand seems ok (~ 8000 RU?).
If the deactivation in detrimental for your ligand you can only check with a positive interaction. For instance with an antibody?
If you think that the deactivation solution is to harsh, use a diluted solution or use just TBS. I think that you do not have to worry if the deactivation is efficient enough. Seven minutes is.